Smart Sensors and MEMS
Title: Smart Sensors and MEMS
Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)
Publisher: Springer Verlag
Hardcover: 480 pages
Pubdate: January, 2005
Price: $ 89.95 (paperback), $ 199.00 (hardcover)
Chapter 4. Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films
The operating principles, design and manufacturing in thick-film technology (TFT) of sensors based on the piezoelectric and pyroelectric properties of lead zirconate titanate (PZT) thick films are described. In particular, the attention is focused on acoustic-wave piezoelectric sensors for physical and chemical quantities, and on pyroelectric sensors and arrays for light spot position measurement.
Keywords: piezoelectric sensor, pyroelectric sensor, acoustic-wave sensor, sensor array, thick-film technology, lead zirconate titanate (PZT).
Vittorio Ferrari, Professor, Dr., Dip. Elettronica per l'Automazione, Facoltá di Ingegneria - Universitá di Brescia, Via Branze, 38 - I25123 Brescia – Italy. E-mail: email@example.com
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