Smart Sensors and MEMS
Title: Smart Sensors and MEMS
Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)
Publisher: Springer Verlag
Hardcover: 480 pages
Pubdate: January, 2005
Price: $ 89.95 (paperback), $ 199.00 (hardcover)
Chapter 8. Modern Silicon-based MEMS Technology
The fabrication technology for Si-MEMS devices is mainly derived from the processes used for the realization of microelectronic devices. However, due to the specific demands for MEMS, there are special processes needed for MEMS devices. In this chapter, after reviewing general aspects of microtechnology some of the specific MEMS-processes will be discussed, e.g. bulk-micromachining, surface micromachining, DRIE and SOI-technology.
Keywords: MEMS, microsystem technology, Si-technology, Si-micromachining
Ulrich Mescheder, Professor, Dr., FH Furtwangen - University of Applied Sciences, Furtwangen, Department Computer and Electrical Engineering,, Robert-Gerwig-Platz 1, D-78120 Furtwangen, Germany, E-mail: email@example.com
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