bullet Smart Sensors and MEMS



Smart Sensors and MEMS book's cover

Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

Buy It




Chapter 8. Modern Silicon-based MEMS Technology

(Ulrich Mescheder)






The fabrication technology for Si-MEMS devices is mainly derived from the processes used for the realization of microelectronic devices. However, due to the specific demands for MEMS, there are special processes needed for MEMS devices. In this chapter, after reviewing general aspects of microtechnology some of the specific MEMS-processes will be discussed, e.g. bulk-micromachining, surface micromachining, DRIE and SOI-technology.


Keywords: MEMS, microsystem technology, Si-technology, Si-micromachining




Ulrich Mescheder, Professor, Dr., FH Furtwangen - University of Applied Sciences, Furtwangen, Department Computer and Electrical Engineering,, Robert-Gerwig-Platz 1, D-78120 Furtwangen, Germany, E-mail: mes@fh-furtwangen.de

Ulrich Mescheder photo





Back to book's web page


1999 - 2005 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.