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Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

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Chapter 9. Porous Silicon: Technology and Applications for Micromachining and MEMS

(Ulrich Mescheder)






Porous Si is formed out of single crystalline silicon in a CMOS-compatible electrochemical etch process. This material provides due to its nanoporous structure and high porosity several applications in microsystems/MEMS. Applications of porous Si are found in optics (luminescence, electroluminescence, Bragg-filters), sensing (humidity, gas sensing), chemical reactions (reformers and fuel cells) and microfabrication (sacrificial layer, 3D structuring). Results of research work in our laboratory are presented together with a review of most relevant results of other groups.


Keywords:   Porous Silicon, multifunctional material, MEMS, microsystem technology, Si-technology, Si-micromachining, humidity sensor



Ulrich Mescheder, Professor, Dr., FH Furtwangen - University of Applied Sciences, Furtwangen, Department Computer and Electrical Engineering,, Robert-Gerwig-Platz 1, D-78120 Furtwangen, Germany, E-mail: mes@fh-furtwangen.de

Ulrich Mescheder photo





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