bullet Electroceramic-Based MEMS: Fabrication-Technology and Applications

 

 

  Title: Electroceramic-Based MEMS: Fabrication-Technology and Applications

  Author: N. Setter (Editor)

  Publisher: Springer

  Hardcover: 400 pages

  Pubdate: 3 March 2005

  ISBN: 0387233105

 

 

Electroceramic-based MEMS book's cover

Book Description

 

 

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

 

Buy It

 

Search for Other Books:

  

Book search

 

 

 

 

 

Back

   


1999 - 2005 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.