bullet Wolfgang Menz, Microsystem Technology

John Wiley & Sons Inc.   

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Description

 

An introduction to microsystems technology, including the latest trends in the discipline. Features chapters on silicium and LIGA technology, applications in medicine and health technology, lithography, and electroplating.

 

 

Table of Contents

 

  • General Introduction to Microstructure Technology.

  • The Parallels to Microelectronics.

  • The Physical and Chemical Basics in Microtechnology.

  • Basic Technologies in MEMS.

  • Lithography.

  • Silicon Microsystem Technology.

  • The LIGA Process.

  • Alternative Processes of Microstructuring.

  • Packaging and Interconnecting Techniques (PIT).

  • System Technology.

  • Literature.

 

 

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