bullet Wolfgang Menz, Microsystem Technology

John Wiley & Sons Inc.   

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An introduction to microsystems technology, including the latest trends in the discipline. Features chapters on silicium and LIGA technology, applications in medicine and health technology, lithography, and electroplating.



Table of Contents


  • General Introduction to Microstructure Technology.

  • The Parallels to Microelectronics.

  • The Physical and Chemical Basics in Microtechnology.

  • Basic Technologies in MEMS.

  • Lithography.

  • Silicon Microsystem Technology.

  • The LIGA Process.

  • Alternative Processes of Microstructuring.

  • Packaging and Interconnecting Techniques (PIT).

  • System Technology.

  • Literature.





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