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Vol. 13, Special Issue, December 2011, pp.I-III




MEMS & NEMS: Design, Fabrication and Applications




Elena Gaura, James P. Brusey, Ramona Rednic


29 June 2011 /Accepted: 16 November 2011 /Published: 28 December 2011


Handbook of Laboaratory Measurements book


The 14th annual NSTI Nanotechnology Conference and Trade Show was held this year in June 13th to 16th at the Hynes Convention Center, Boston, MA. The conference was co-located with TechConnect Summit 2011, Clean Technology 2011, Microtech 2011, Bio Nanotech 2011, TechConnect World 2011. Overall, Nanotech brought together over 5000 attendees and 300 exhibitors, while the resulting proceedings boast over 2000 pages of peer-reviewed micro and nanotechnology research.


Following a series of successful Special Issues (2007-2009), this year, a number of the conference authors were invited to submit a revised and extended account of their work. Invitations were issued to best papers selected from a number of symposia including: Novel MEMS & NEMS Devices: Design & Fabrication, Energy Storage, Grid & Transportation Technologies, MEMS & NEMS Fabrication, Devices & Applications, Micro & Nano Fluidics, Carbon Nano Structures & Devices, Energy Storage, Grid & Transportation Technologies, Bio Sensors, Diagnostics, Imaging & Instrumentation, Nano & Micro: Computational Methods, Simulation & Software Tools, Nanostructured Coatings, Surfaces & Films. These symposia brought together researchers from a number of disciplines to discuss topics ranging from theoretical developments and materials research, to design and fabrication of sensors and actuators, through to industrial applications of MEMS and NEMS sensors, devices and systems.


The works in this Special Issue are primarily inspired by the promise of: (a) smarter, smaller, and more complex systems that integrate micro and nano system technologies with intelligence, power and communication ability at the same micro or nano scale and (b) novel materials and manipulation at nano-scale to achieve high level functionality. Both areas above result in an increase in complexity, which poses new challenges to engineers when designing, modeling, and fabricating such integrated micro and nano systems. Papers are thus ranging from reports on end-to end real-life sensing applications and systems to those covering low-level physical aspects of micro and nano sensors and devices, their proof of concept, characterization, modeling and fabrication. Several samples of leading-edge device research are brought forth by this Special Issue, for example: phosphor thermometry, carbon nano-materials for optical applications, wideband RF nano switches, photon driven micro-motors, anoreinforced composite materials with sensing capabilities, MEMS structures for residual stress measurement, nanowoven fibers for biosensing applications, microfluidic biosensors and more.


At systems and applications level, the papers selected for the issue report on several biosensors applications coupled with high level wireless sensing systems deployed to achieve enhanced safety in space and ground applications. Energy harvesting and wideband RF nano-switches are also put forth as future components for wireless sensing systems.


From the symposia submissions, 30 papers were selected and authors invited to submit extended versions of their conference publication. Of these, following peer-reviewing, 16 were selected to be published in this special issue.


We are very thankful both to the NSTI directors and Nanotech chairs (Dr. Matthew Laudon and Dr. Bart Romanovicz) and to the Sensors & Transducers editors for offering the opportunity to publish this Special Issue.




Elena Gaura, James Brusey, and Ramona Rednic



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