On-line Magazine 'Sensors & Transducers' (S&T e-Digest)
(ISSN 1726- 5479)
Vol. 37, Issue 11, November 2003, pp. 47-53
Optimum Electrode Design for Micro-Mechanical Beam Structures Operating
in Voltage-Controlled Actuation Mechanism
Sayanu PAMIDIGHANTAM1, Robert PUERS3, Robert MERTENS2, and Harrie A. C. TILMANS2
1National MEMS Design Centre (NMDC), Department of Electronics and Communications Engineering,
Indian Institute of Science (IISC), Bangalore 5600012, India
E-mail correspondence: firstname.lastname@example.org
2MCP-MEMS, IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
3Department of ESAT, KU Leuven, Kardinaal Mercierlaan 94, B-3001, Leuven, Belgium
Received: 11 November 2003 /Accepted: 18 November 2003 /Published: 22 November 2003
Abstract: In this paper, the optimum conditions for actuating a two plate electrostatic MEMS structure wherein the top plate is a freestanding beam structure is discussed. The preferred configurations of basic beam structures of fixed-fixed and fixed-free type are derived for voltage-controlled actuation mechanism. It was found that the required lengths of bottom electrode vary from 45.9% to 52.3% & 39.7% to 42.4% of length of the top plate beam corresponding to fixed-fixed and fixed-free type and voltage-controlled actuation mechanism.
Keywords: Actuation voltage, voltage-controlled actuation, optimum electrode configuration, fixed-fixed beam, fixed-free beam
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