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2000-2002 S&T e-Digest Contents


Vol. 37, Issue 11,  November 2003, pp. 47-53




Optimum Electrode Design for Micro-Mechanical Beam Structures Operating

in Voltage-Controlled Actuation Mechanism


Sayanu PAMIDIGHANTAM1, Robert PUERS3, Robert MERTENS2, and Harrie A. C. TILMANS2


1National MEMS Design Centre (NMDC), Department of Electronics and Communications Engineering,

Indian Institute of Science (IISC), Bangalore 5600012, India

E-mail correspondence: sghantam@ece.iisc.ernet.in

2MCP-MEMS, IMEC, Kapeldreef 75, B-3001, Leuven, Belgium

3Department of ESAT, KU Leuven, Kardinaal Mercierlaan 94, B-3001, Leuven, Belgium



Received: 11 November 2003 /Accepted: 18 November 2003 /Published: 22 November 2003


Abstract: In this paper, the optimum conditions for actuating a two plate electrostatic MEMS structure wherein the top plate is a freestanding beam structure is discussed. The preferred configurations of basic beam structures of fixed-fixed and fixed-free type are derived for voltage-controlled actuation mechanism. It was found that the required lengths of bottom electrode vary from 45.9% to 52.3% & 39.7% to 42.4% of length of the top plate beam corresponding to fixed-fixed and fixed-free type and voltage-controlled actuation mechanism.


Keywords: Actuation voltage, voltage-controlled actuation, optimum electrode configuration, fixed-fixed beam, fixed-free beam


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