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Vol. 143, No. 8, August 2012, pp. 98-105




Design and Simulation of a Novel MEMS Based Linear Actuator for Mirror Shape Correction Applications

Ehsan Atashzaban

Electrical engineering department, Sahand University of Technology,

Tabriz, Sahand new town, 47147, Iran

Tel.: +98-935-810-32-08

E-mail: eatashzabn@yahoo.com



Received:   1 June 2012   /Accepted: 21 August 2012   /Published: 28 August 2012

Digital Sensors and Sensor Sysstems


Abstract: In this paper, we propose MEMS based Electro-thermal actuator that can achieve minimum step size less of 100 nm; Actuator consisted of slider and griper .In the slider structure used of the two electro-thermal chevrons that led to linear forward motion of the slider. The gripper is consisting of clutch and chevrons. The clutch used to connect the slider to the substrate, and the chevrons used to release the clutches. With apply DC voltage of 0.5 Volts; a force is produced by the slider that is 8 mN and a stroke is equal to 2.2 m. Large stroke is achieved by repeating the step sizes sequentially. Also an important property in this work is the normally latched or zero-power latching scheme.


Keywords: Electro-thermal, Micro-actuator, Chevron, Slider, Gripper


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