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Vol. 143, No. 8, August 2012, pp. 106-119




Virtual Fabrication, 3D Electromechanical Simulation and System Level Modeling of MEMS Capacitive Pressure Sensor
for Tire Pressure Monitoring System
Anurekha Sharma, Munju Mittal, Deepika Saini

Electronic Science Department, Kurukshetra University, Kurukshetra, 136119, India

Tel.: 91-1744-238410 ext. 2823, 91-1744-238023

E-mail: anurekhasharma@kuk.ac.in



Received: 4 July 2012   /Accepted: 21 August 2012   /Published: 28 August 2012

Digital Sensors and Sensor Sysstems


Abstract: Tire pressure monitoring system (TPMS) plays an important role in automobile safety. One of the important components of TPMS is a MEMS pressure sensor. This paper presents the virtual prototyping of TPMS which involves design, virtual fabrication and system level modelling of a square as well as acircular diaphragm based capacitive pressure sensor for a given stroke length. Intellisuite® MEMS design tool is used for obtaining the virtual prototype. The analytical expression for the sensitivity of square diaphragm in small deflection regime is derived and comparison of calculated results with simulated is presented.


Keywords: TPMS, MEMS, Intellisuite, Capacitive pressure sensor


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