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Vol. 144, No. 9, September 2012, pp. 131-142

 

Bullet

 

Design and Simulation of a Microgripper with the Ability of Releasing Nano Particles by Vibrating End-Effectors
 

Hamed Demaghsi, Hadi Mirzajani, Ehsan Atashzaban, Habib Badri Ghavifekr

Department of Electrical Engineering

Sahand University of Technology, Iran

E-mail: h_demaghsi@sut.ac.ir, h_Mirzajani@sut.ac.ir, e_atashzaban@sut.ac.ir, badri@sut.ac.ir

 

 

Received: 17 July 2012   /Accepted: 21 September 2012   /Published: 28 September 2012

Digital Sensors and Sensor Sysstems

 

Abstract: This paper investigates the design and simulation of a new type of microgrippers which is able to release nano particles by vibration. After picking and transferring the object to the desirable substrate electrothermally, an electrostatic oscillation system (comb-drive) generates vibration at the gripper arms that facilitates the release process by taking advantage of inertial effects.

 

Keywords: Micro electro mechanical systems (MEMS), Vibrating microgripper, Nanohandling, Active release technique

 

 

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