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Vol. 147, No. 12, December 2012, pp. 15-26




Thermal Sensitivity of Solid Polymer Coated Surface Transverse/Love Wave Based Resonators
on AT-cut Quartz for Sensor Applications

Georgy Nadjakov Institute of Solid State Physics,

72 Tzarigradsko Chaussee Blvd.

1784 Sofia, Bulgaria

Tel.: + (3592) 979 5762



Received: 21 September 2012   /Accepted: 18 December 2012   /Published: 31 December 2012

Digital Sensors and Sensor Sysstems


Abstract: Thermal and mass sensitivity data from solid polymer coated shear horizontal (SH) wave two-port resonators on AT-cut quartz for sensor applications are measured and compared with data from identically coated Rayleigh surface acoustic wave (RSAW) based resonators of a similar design operating at the same acoustic wave length. The acoustic devices were coated at 6 different thicknesses in the 0 to 300 nm range with the chemosensitive solid hexamethyldisiloxane (HMDSO) polymer film obtained in a plasma polymerization process. It was found that above a certain film thickness the SH-wave resonators simultaneously support two modes the surface transverse wave (STW) mode and the 1st order Love mode. Major differences in the quasi parabolic temperature frequency characteristics (TFCs) over the (-50 to +120) C range of these two modes are identified and discussed.


Keywords: Thermal sensitivity, Solid polymer films, Shear horizontal waves, Love waves, Sensors



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