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Vol. 147, No. 12, December 2012, pp. 61-67




A Novel Tuning Method for Repeatability Problem Solving of RF MEMS Disk Resonators
Masoud Baghelani, Habib Badri Ghavifekr, Afshin Ebrahimi

Department of Electrical Engineering, Sahand University of Technology, Tabriz, Iran

Tel: +98 918 343 7239

E-mail: m_baghelani@sut.ac.ir



Received: 23 July 2012   /Accepted: 18 December 2012   /Published: 31 December 2012

Digital Sensors and Sensor Sysstems


Abstract: Despite of their very high quality factors, RF MEMS resonators suffer from repeatability problems which preventing them to be commercialized. This paper proposes a method for enabling RF MEMS resonators to become repeatable. The proposed method, utilizes recently demonstrated ring shape anchored contour mode disk resonator constructing from an AlN layer sandwiched between two thin polysilicon layers. The anchor is configured from the continuum ring to crossed ring providing distinct electrodes for applying controlling DC voltages. By such a method, process variations in 0.18 μm technology and below, can be compensated and one of the most significant bottlenecks in the way of commercializing RF MEMS resonators is vanished.


Keywords: RF MEMS resonators, Tuning, Repeatability, Ring shape anchored, Contour mode disk



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