On-line Magazine 'Sensors & Transducers' (S&T e-Digest)
(ISSN 1726- 5479)
Vol. 38, Issue 12, December 2003, pp. 74-81
Simulations of Piezoelectric Actuator by Finite Element Analysis
Der-Ho Wu 1 , Jeun-Wen Wu2, Ming-Feng Wu3, Chih-Jen Yang3
1 Department of Mechanical Engineering, Associate Professor
3 Department of Mechanical Engineering, Graduate student
National Pingtung University of Science and Technology
2 Department of Marine Engineering, Instructor
National Kaohsiung Institute of Marine Technology
Kaohsiung, Taiwan 811, R.O.C.
Hseuh Fu Road, 1, Neipu Hsiang, Pingtung, Taiwan, R.O.C. 91207
Tel.: +886-8-7703202, e-mail: email@example.com
Received: 12 November 2003 /Accepted: 12 December 2003 /Published: 18 December 2003
Abstract: The main objective of this paper is to use Finite Element Methods to simulate and analysis piezoelectric actuator. Silicon based clamp-free beam mounted with both sides PZT layer is used for analysis. The couple-field analysis is important for MEMS and use the FEM to achieve the results is the trend of this moment for saving cost and time. The studies are including the resonant frequency and harmonic response of piezocerarmic material. The equivalent piezoelectric transducer analysis and transient response are also discussed in detail. The simulative results from ANSYS are compared to the theoretic values as well.
Keywords: finite element method, piezoelectric actuator, transient response, couple-field analysis
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