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2000-2002 S&T e-Digest Contents


Vol. 38, Issue 12, December 2003, pp. 74-81




Simulations of Piezoelectric Actuator by Finite Element Analysis


Der-Ho Wu 1 , Jeun-Wen Wu2, Ming-Feng Wu3, Chih-Jen Yang3


1 Department of Mechanical Engineering, Associate Professor

3 Department of Mechanical Engineering, Graduate student

National Pingtung University of Science and Technology

2 Department of Marine Engineering, Instructor 

National Kaohsiung Institute of Marine Technology

Kaohsiung, Taiwan 811, R.O.C.

Hseuh Fu Road, 1, Neipu Hsiang, Pingtung, Taiwan, R.O.C. 91207

Tel.: +886-8-7703202, e-mail: derhowu@mail.npust.edu.tw



Received: 12 November 2003    /Accepted: 12 December 2003    /Published: 18 December 2003


Abstract: The main objective of this paper is to use Finite Element Methods to simulate and analysis piezoelectric actuator. Silicon based clamp-free beam mounted with both sides PZT layer is used for analysis. The couple-field analysis is important for MEMS and use the FEM to achieve the results is the trend of this moment for saving cost and time. The studies are including the resonant frequency and harmonic response of piezocerarmic material. The equivalent piezoelectric transducer analysis and transient response are also discussed in detail. The simulative results from ANSYS are compared to the theoretic values as well.


Keywords: finite element method, piezoelectric actuator, transient response, couple-field analysis


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