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Vol. 151, No. 4, April 2013, pp. 18-23




Performance Enhancement of Silicon MEMS Microspeaker
3 Alexandre HOUDOUIN, 1,2 Iman SHAHOSSEINI, 1,2 Hervé BERTIN, 3 Nourdin YAAKOUBI, 1,2 Elie LEFEUVRE, 1,2 Emile MARTINCIC,
3 Yves AUREGAN, 3 Stéphane DURAND

1 Univ. Paris-Sud, Laboratoire IEF, UMR-8622, Bât. 220, F-91405 Orsay, France

2CNRS, F-91405 Orsay, France

3 LUNAM Université, LAUM (Laboratoire d'acoustique de l'université du Maine),
UMR CNRS 6613, Avenue Olivier Messiaen, F-72085 Le Mans, France

Tel.: +33 (0)1 69 15 42 90

E-mail: alexandre.houdouin@univ-lemans.fr


Received: 30 December 2012   /Accepted: 18 April 2013   /Published: 30 April 2013

Digital Sensors and Sensor Sysstems


Abstract: In this paper, we present an enhancement of silicon MEMS microspeakers developed in a previous work by using a polymer film. When the silicon MEMS microspeaker was designed and manufactured, the choice of silicon beams suspensions allowed to obtain a very large stroke. This design also allowed to increase significantly the efficiency of the electro-acoustic transduction. However, as counterpart, fluidic leakage (between frontside and backside of the transducer) results in the limitation of the loudspeaker efficiency. The designed solution presented here consists in making a highly flexible enclosure of the air path. A thin polymer film was formed using a Teflon® mould and baked to promote its polymerization followed by an alignment and a transfer onto the microspeaker surface. The aim of this paper is to present simulations and micro-fabrication processes of such polymer seals which limit their impacts on the mechanical characteristics of the microspeaker.


Keywords: MEMS, Microspeaker, Acoustic leakage, Process


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