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Vol. 151, No. 4, April 2013, pp. 41-46




Design and Simulation of a MEMS-based Large Traveling Linear Motor for Near Infrared Fourier Transform Spectrometer

Ehsan Atashzaban, Mahdi Nasiri, Hadi Mirzajani, Hamed Demaghsi, Habib Badri Ghavifekr

Electrical engineering department, Sahand University of Technology,

Tabriz, Sahand new town, 47147, Iran

Tel.: +98-935-810-32-08, E-mail: eatashzabn@yahoo.com



Received: 25 October 2012   /Accepted: 18 April 2013   /Published: 30 April 2013

Digital Sensors and Sensor Sysstems


Abstract: In this article, a MEMS-based Linear Micro-motor (LMM) for Fourier Transform Spectrometer (FTS) applications is proposed and designed. The FTS is a Michelson interferometry with a scanning mirror. The LMM composed of the two main parts; gripper and slider system. By applying appropriate DC voltage to array pads of the V-Beam driving Actuators (VBDA) of the gripper and array pads of the VBDA of the slider, a step size 2.5 m is achieved. Repeating the step sizes sequentially, leads to a large traveling range about 500 m. Simulations carried out with the ANSYS software.


Keywords: Fourier transform spectrometer (FTS), LMM, Slider, Gripper, VBDA


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