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Vol. 151, No. 4, April 2013, pp. 47-53

 

Bullet

 

A Large Stroke MEMS-based Linear Motor for Fourier Transform Spectrometer Applications
 

Ehsan Atashzaban, Hadi Mirzajani, Mahdi Nasiri, Milad Sangsefidi

Electrical engineering department, Sahand University of Technology,

Tabriz, Sahand new town, 47147, Iran

Tel.: +98-935-810-32-08

E-mail: eatashzabn@yahoo.com

 

 

Received: 25 October 2012   /Accepted: 18 April 2013   /Published: 30 April 2013

Digital Sensors and Sensor Sysstems

 

Abstract: In this paper, a MEMS-based linear motor for Fourier transform spectrometer (FTS) is designed and simulated. The FTS consists of a Michelson interferometer and linear micro motor (LMM); the LMM consist of two main part; slider, gripper. Maximum step size is equal to 3 m; large stroke will be achieved by repeating the step sizes sequentially. Maximum amount of the large stroke is equal to 400 m.

 

Keywords: Gripper FTS, Wave train, Linear motor, Slider, Gripper, Array of V-beam actuators

 

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