Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 79, Issue 5, May 2007, pp. 1173-1179
Investigation of Pull-in Phenomenon on a Extensible Micro Beam Subjected to Electrostatic Pressure
Ghader Rezazadeh1, Hamed Sadeghian2, Isa Hosseinzadeh 3, Alireza Toloei 4
1,2 Mech. Eng. Dept. Urmia University, Urmia, Iran, tel.: +98-914-145-1407,
3Space Eng. Dept., Shahid Beheshti University, Tehran, Iran
4 Civil Eng. Dept. Koy Azad University, Khoy, Iran
Received: 22 April 2007 /Accepted: 11 May 2007 /Published: 31 May 2007
Abstract: An improved electromechanical model of an extensible micro beams was introduced, in which the effects of intrinsic residual stress from fabrication processes, fringing field and axial stress due to stretching of the extensible fixed-fixed beam were taken into account. When the maximum deflection is less than the thickness, a small deflection can be considered valid, and the stretching can be neglected. But for MEMS switches, the gap is usually larger than the beam thickness, so that the maximum deflection in the middle point is larger than beam thickness. In this paper the effect of axial stress of micro beam on divergence instability or pull-in voltage of the fixed-fixed end type microbeams (such as MEMS switches) were studied. The governing nonlinear integro-differential equation of the micro beam was derived and was numerically solved and was calculated more accurate pull-in voltage. The results calculated from the proposed model agree closely with the measured data.
Keywords: MEMS, Extensible Beam, Pull-in voltage, Electrostatic, Residual stress
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