Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 79, Issue 5, May 2007, pp. 1217-1224
Sol-Gel Processed Titania Films on a Prism Substrate as an Optical Moisture Sensor
B. C. Yadav
Nanomaterials and Sensors Research Laboratory
Department of Physics, University of Lucknow,
Received: 8 April 2007 /Accepted: 11 May 2007 /Published: 31 May 2007
Abstract: Sensing elements of the Optical Moisture Sensor presented here consist of rutile structured one to four layered Titania thin films deposited on the base of an isosceles glass prism by using a Photo Resist Spinner. These films are annealed at 450˚C for four hours and then they become porous and sensitive to moisture. Light from an unpolarised 2mW He-Ne Laser of wavelength 630 nm enters the prism from one of its isosceles faces and gets reflected from the glass-film interface at its base. The reflected light emerging out from the other isosceles face of the prism is collected through an optical fibre and fed into an optical power meter for measurement. Variations in the intensity of light caused by changes in humidity lying in the range 5% RH to 95%RH have been recorded. A proper configuration with two layered Titania film for such a sensor yields high sensitivity for it over the entire range of humidity.
Keywords: Moisture sensor, Humidity, Film, Prism, Titania
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