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Vol. 158, Issue 11, November 2013, pp. 295-301




Merit Function Improvement Method of Thin-Film Thickness Wideband Monitoring System
1 Xiao-Yan SHANG, 1 Jun HAN, 2 Xu JIANG

1 School of Optoelectronics Engineering, Xi'an Technological University, Xi'an, 710032, China

2 Xi'an Institute of Applied Optics, Xi'an, 710065, China
Tel.: 1 029-86173335, fax: 1 029-86173335
E-mail: shaxiayan@126.com


Received: 19 August 2013   /Accepted: 25 October 2013   /Published: 30 November 2013

Digital Sensors and Sensor Sysstems


Abstract: In the thin-film thickness wideband monitoring system based on merit function, because the transmittance spectrum curve measured deviates from the designed, merit function becomes divergence, which results in the monitoring failure. For improving merit function, beginning from the first layer, the actual optical constants of each thin-film layer having been deposited were calculated in real-time by Simulated Annealing algorithm in use of the transmittance spectrum curve measured; Then they were used to determine the new layer number and the thickness of the layers to be deposited based on the transmittance spectrum curve required of coating; Simultaneously the new transmittance spectrum curve designed was achieved and it subtracted the absorption curve of the layers having been deposited for obtaining the final transmittance spectrum curve designed, so merit function was improved in layer by layer. The experimental result showed that minimum of merit function of last layer changed from 0.0983 to 0.0052 after it was improved and the thickness monitoring error may be less than 10-2, the precision met the practical requirement.


Keywords: Merit function improvement, Actual optical constants, Simulated Annealing algorithm, Absorption compensation in layer by layer.


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