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Vol. 160, Issue 12, December 2013, pp. 215-219




Fiber-optic Michelson Interferometer Sensor Fabricated by Femtosecond Lasers
Dong LIU, * Ying XIE, Gui XIN, Zheng-Ying LI

School of Information and Engineering, Key Laboratory of Fiber Optic Sensing Technology and information Processing, Ministry of Education,
Wuhan University of Technology, Wuhan 430070, China

* Tel.: 86-13469972487

* E-mail: xying070@163.com


Received: 18 September 2013   /Accepted: 22 November 2013   /Published: 30 December 2013

Digital Sensors and Sensor Sysstems


Abstract: The femtosecond laser is widely applied in all kinds of laser micro machining technology with its short pulse duration, high peak power, high machining accuracy and low damage threshold. A fiber optic Michelson interferometer cavity is presented by using femtosecond laser micromachining technology. The cavity has good shape of interference fringes and high contrast which is up to 15 dB. A demodulation algorithm is proposed to calculate the cavity length with high resolution. The temperature experiment shows that the interferometer cavity has sensitivity of 0.00428 ?m/ C with good linearity. In addition, the micro fiber Michelson sensor is resistant to high temperature and great potential for application in harsh environments.


Keywords: Optic fiber sensor, Femtosecond laser, Fiber-optic Michelson Interferometer temperature sensor, Temperature sensing, Frequency estimation


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