On-line Magazine 'Sensors & Transducers' (S&T e-Digest)
(ISSN 1726- 5479)
Vol. 40, Issue 2, January 2004, pp. 137-144
An Efficient Piezoelectric Analysis for Quartz Crystal Nanobalance Gas Sensor
1Associate Professor, PhD, 2Graduate student
Microsystems Simulation and Design Lab., Department of Mechanical Engineering,
National Pingtung University of Science and Technology,
1, Hseuh Fu Road, Neipu Hsiang, Pingtung, Taiwan, R.O.C. 91207
Tel.: +886-8-7703202-7018, fax: +886-8-7740142
Received: 1 February 2004 /Accepted: 14 February 2004 /Published: 20 February 2004
Abstract: This paper presents an efficient scheme to design the most used biosensor Quartz crystal nanobalance (QCN). The main characteristic of QCN is very mass sensitivity. It means a little variation of deposited mass on the surface of QCN and it will cause the change of thickness-shear-mode resonant frequency. An electro-mechanical coupled-field 3D finite element method is applied to analyze the resonant frequency, modal shape, harmonic response, and the contour effect for AT-cut piezoelectric quartz crystal (PQC). Finally, the application of QCN as gas sensor is illustrated and studied in detail. All the simulated results indicate well compared to the theoretical values and experimental results.
Keywords: piezoelectric quartz crystal (PQC); Quartz crystal nanobalance (QCN); Finite element method (FEM); electro-mechanical coupled field; thickness-shear-mode (TSM)
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