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Vol. 168, Issue 4, April 2014, pp. 133-136




Miniature Capacitance Diaphragm Vacuum Sensor

Feng Yan, * Sun Wenjun, Ma Ben, Dong Meng, Zhang Ruifang

Lanzhou Institute of Physics, Lanzhou 730000, China
* Tel.: 0931-4585496, fax: 0931-8265391

* E-mail: sunwen--0603@163.com


Received: 30 December 2013 /Accepted: 7 March 2014 /Published: 30 April 2014

Digital Sensors and Sensor Sysstems


Abstract: Commercial capacitance diaphragm vacuum sensor cannot be satisfied of the requirement for vacuum measurement in deep space exploration; the miniature capacitance diaphragm vacuum sensor has been designed. The linearity, stability and repeatability of miniature capacitance diaphragm vacuum sensor have been studied on the static expansion vacuum standard. The results show that the metrological characteristic of the miniature capacitance diaphragm vacuum sensor can meet the deep space exploration needs.


Keywords: Miniature capacitance diaphragm vacuum sensor, Linearity, Stability, Repeatability, Experimental research.


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