Sensors & Transducers Journal

    (ISSN 1726- 5479)

Vol. 84, Issue 10, October 2007, pp.1641-1650

Mechanical Behavior of a Thermal Micromirror Based on a Bimetallic Cantilever Beam

Ghader Rezazadeh, Maliheh Pashapour, Leila Borghei

Mech. Eng. Dept. Urmia University, Urmia, Iran

Tel.: +98-914-145-1407, fax: +98-441-277-7022

E-mail: g.rezazadeh@mail.urmia.ac.ir

Received: 26 September 2007   /Accepted: 23 October 2007   /Published: 30 October 2007

Abstract: In this work mechanical behavior of a thermal micromirror based on a bimetallic cantilever microbeam was studied. The main target is to control the reflection of an incident ray in order to strick to a specific point. Tip slope of the bimetallic beam that is deflected due to temperature changes acts as an intermediary to relate the angle of the reflected ray and temperature changes. Governing equations to indicate the relation were derived and analytically solved. Required time of the system to the temperature changes was calculated. Detecting the position of the reflected ray is possible whereas deflection and consequently slope of the beam vary linearly with temperature. The proposed micromirror can be used as a thermal sensor whereas deflection varies linearly with temperature.

Keywords: MOEMS, Micro cantilever beam, Bimetal, Thermal, Micromirror

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