Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 85, Issue 11, November 2007, pp.1739-1744
Nanocomposites Sn-Si-O and Sn-Mn-O for Gas Sensors
Ekaterina REMBEZA, Stanislav REMBEZA
Voronezh State Technical University,
Moscow av., 14, 394026 Voronezh, Russia,
Tel.: +7-4732-437695, fax: +7-4732-463277
Received: 8 November 2007 /Accepted: 20 November 2007 /Published: 26 November 2007
Abstract: Thin film nanocomposites Sn-Si-O and Sn-Mn-O were prepared by high frequency ion-beam reactive sputtering. The element composition (X-ray microanalyser JXA-840), the surface morphology (atomic force microscope FemtoScan-001), electrical properties (Hall effect) and gas sensitivity were investigated. The similar character of influence films element composition on the grain size of polycrystals and electrical and gas sensitive properties of the samples was determined. The increase of additive amount in nanocomposites leads to the decrease of grain size and enhancement of adsorption activity of surface states in the film.
Keywords: Nanocomposites, Element composition, Electrical-physical properties, Gas sensitivity
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