bullet Sensors & Transducers Journal

    (ISSN: 2306-8515, e-ISSN 1726-5479)

0.705

2013 Global Impact Factor

205.767

2008 e-Impact Factor

25 Top Downloaded Articles

Best Selling Articles 2012

Journal Subscription 2014

Editorial Calendar

Submit an Article

Editorial Board

Current Issue

S&T journal's cover

Sensors & Transducers Journal 2011

Sensors & Transducers Journal 2010

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents

 

Best Articles 2011

 

 

 

Vol. 174, Issue 7, July 2014, pp. 1-7

 

Bullet

 

Design of Piezoresistive MEMS Pressure Sensor Chip for Special Environments
 

1 Bo JIANG, 1 Xing-lin QI, 2 Jiakai LIU, 3 Bo JIA

1 Mechanical Engineering College, Shi Jia Zhuang, 050003, China
2 Equipment Engineering College, Armed Police Engineering University, Xian, 710086, China
3 Military Representative Bureau, Xian, 710054, China
1 Tel.: +86-0311-87994314, fax: +86-0311-87994314

E-mail: jn007jiang@gmail.com

 

Received: 20 February 2014 /Accepted: 30 June 2014 /Published: 31 July 2014

Digital Sensors and Sensor Sysstems

 

Abstract: To meet the pressure sensors used in special harsh environments, the MEMS piezoresistive pressure sensor design is proposed that the technology is more mature and more extensive used. The research of Piezoresistive sensor chip is done based on the analysis of sensor principle. The chip substrate material is selected combine with the special environment. The range sensor chip design is done based on small deflection theory and silicon material diaphragm piezoresistive effect theory. In order to avoid resonance modal analysis of the diaphragm is done. The force-sensitive resistor strip and its layout in the diaphragm is designed combine with the round diaphragm stress distribution. Semi-open-loop mode bridge is choice based on the comparison of advantages and disadvantages of three bridge modes. Given the special environment of vibration, acceleration sensitivity calculations must be done to adapt vibration environments for pressure sensor. Theory basis in sensor design is full, design projects and parameters combine with special environmental closely, and the research will have important significance for further study of special environmental pressure sensor.

 

Keywords: Special environment, Piezoresistive, MEMS, Pressure sensor, Force-sensitive resistor strip, Diaphragm.

 

Acrobat reader logo Click <here> or title of paper to download the full pages article in pdf format

 

 

Subscribe the full-page Sensors & Transducers journal in print (paper) or pdf formats

(shipping cost by standard mail for paper version is included)

(25 % discount for IFSA Members)

 

 

 

Alternatively we accept a money transfer to our bank account. Please contact for details: sales@sensorsportal.com

 

 

Download <here> the Library Journal Recommendation Form

 

 

Read more about Pressure Sensors

 

 

 

 

 


1999 - 2014 Copyright , International Frequency Sensor Association (IFSA) Publishing, S.L. All Rights Reserved.


Home - News - Links - Archives - Tools - Voltage-to-Frequency Converters - Standardization - Patents - Marketplace - Projects - Wish List - e-Shop - Sensor Jobs - Membership - Videos - Publishing - Site Map - Subscribe - Search

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Submit Press Release - Submit White Paper - Testimonies - Twitter - Facebook - LinkedIn