Vol. 176, Issue 8, August 2014, pp. 99-106

Abstract: In this paper, an electromechanical coupled dynamic model of the micro film subjected to electrostatic force is presented and its electromechanical coupled dynamic equation is given. By the equation, the natural frequencies and vibration modes of the micro film are investigated. The forced responses of the film to voltage excitation are presented. Results show that the natural frequency of the micro film subjected to an electrostatic force is affected by mechanical and electric parameters such as micro film sizes, film tension, voltage and clearance. As the film tension grows, the deviation between the natural frequencies of the film with and without the electrostatic force decreases.

Keywords: Electromechanical coupled, Micro film, MEMS, Natural frequency.

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