Vol. 91, Issue 4, April 2008, pp.14-23

MEMS Tunneling Wide Range Micro Thermometer Based on Bimetallic Cantilever Beam

Samrand K. Nezhadian, Shahram Khalilariya, Ghader Rezazadeh

Mech. Eng. Dept. Urmia University, Urmia, IRAN

Fax: +98-441-277-7022, tel.: +98-914-145-1407

E-mail: g.rezazadeh@mail.urmia.ac.ir

Received: 5 January 2008   /Accepted: 21 April 2008   /Published: 30 April 2008

Abstract: In this Article has been used the extreme sensitivity of electron tunneling to variations in electrode separation as sensing element of a novel thermometer and  electrostatic forces have been used as an actuating element to control the separation between the tunneling electrodes. The entire structure is composed of micromachined bimetallic cantilever beam and a tunneling tip. The results show that the relationship between actuating voltage applied to electrodes and temperature changes is linear and wide range of temperature changes can be measured.

Keywords: Tunneling, Thermometer, Electrostatic force, Bimetallic Cantilever, MEMS

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