Sensors & Transducers Journal (ISSN: 2306-8515, e-ISSN 1726-5479) |
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Vol. 183, Issue 12, December 2014, pp. 60-64
Charge Pumped MEMS Actuation for High Force and Large Displacement 1 Ian R. HARVEY, 1 Brian W. BAKER, 1 Ronald BOUTTE, 2 Alex L. HOGAN, 3 Kurtis R. FORD
1 University of Utah Nanofab, 36 S. Wasatch Dr., SLC, Utah, 84112 USA E-mail: IRHarvey@eng.utah.edu
Received: 27 September 2014 /Accepted: 28 November 2014 /Published: 31 December 2014 |
Abstract:
Keywords: MEMS, Actuator, Out-of-plane, Charge-pump, Biomimetic accommodating lens, Energy harvesting.
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