Vol. 91, Issue 4, April 2008, pp.39-46

Flexible Membrane LRC Strain Sensor Fabricated using MEMS Method

Hee C. LIM^1,*, James ZUNINO III², and John F. FEDERICI¹

¹ New Jersey Institute of Technology, Physics Department, Tiernan Hall, 161 Warren St., Newark, NJ 07103-3537

² U.S. Army RDE Command, AMSRD-AAR-AEE-P, Picatinny Arsenal, NJ 07806-4525

^*Corresponding Author. e-mail: HCL4186@njit.edu

Received: 7 January 2008   /Accepted: 21 April 2008   /Published: 30 April 2008

Abstract: A new flexible inductor-resistor-capacitor (LRC) low-strain sensor design with conventional architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible polyimide substrate is fabricated. The sensing elements are queried wirelessly by an RF spectrum analyzer with tracking generator option installed. These low-strain sensors are subjected to repetitive strains/pressure testing. The LRC sensor’s measured resonant frequency shifts reveal a 3rd degree polynomial loading relationship.

Keywords: Flexible substrate, Wireless strain sensor, Membrane

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