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Vol. 91, Issue 4, April 2008, pp.55-69

 

 

Bullet

Design of MEMS Cantilever - Hand Calculation

 

1, 2Abhijeet V. KSHIRSAGAR, 2S. P. DUTTAGUPTA, 1S. A. GANGAL

1Centre for Sensor Studies, Department of Electronic Science, University of Pune,

Pune 411007, India

2Nanoelectronics Centre, Department of Electrical Engineering,

Indian Institute of Technology Bombay, Mumbai 400076, www.ee.iitb.ac.in

E-mail: abhijeet@unipune.ernet.in, abhijeet@ee.iitb.ac.in

 

 

Received: 25 March 2008   /Accepted: 21 April 2008   /Published: 30 April 2008

 

Abstract: The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae.  Further the article gives insight of important parameters, its dependence and consideration for a good design.

 

Keywords: MEMS, Cantilever, Spring constant, Pull-in and hold down voltage, Resonant frequency

 

 Acrobat reader logo Click <here> or title of paper to download the full pages article (858 K)

 

 

 

 


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