Vol. 91, Issue 4, April 2008, pp.55-69

Design of MEMS Cantilever - Hand Calculation

^{1, 2}Abhijeet V. KSHIRSAGAR, ²S. P. DUTTAGUPTA, ¹S. A. GANGAL

¹Centre for Sensor Studies, Department of Electronic Science, University of Pune,

Pune – 411007, www.electronics.unipune.ernet.in

²Nanoelectronics Centre, Department of Electrical Engineering,

Indian Institute of Technology Bombay, Mumbai – 400076, www.ee.iitb.ac.in

E-mail: abhijeet@unipune.ernet.in, abhijeet@ee.iitb.ac.in

Received: 25 March 2008   /Accepted: 21 April 2008   /Published: 30 April 2008

Abstract: The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae.  Further the article gives insight of important parameters, its dependence and consideration for a good design.

Keywords: MEMS, Cantilever, Spring constant, Pull-in and hold down voltage, Resonant frequency

  Click <here> or title of paper to download the full pages article (858 K)

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