Vol. 91, Issue 4, April 2008, pp.76-83

Design and Fabrication of High Sensitive Piezoresistive MEMS Accelerometer

JOSHI A.B^1*, JOSHI B.P¹. SAM BASKAR S², K. NATARAJAN², S.A.GANGAL¹

¹MEMS & Sensor lab, Dept of Electronic science, University of Pune,

 Pune, India 411007

²MEMS, Bharat Electronic Ltd, Bangalore, India

* abj@electronics.unipune.ernet.in

Received: 25 March 2008   /Accepted: 21 April 2008   /Published: 30 April 2008

Abstract: This paper addresses the design and fabrication of high sensitive single axis piezoresistive micro-accelerometer for 50 g application. MEMS based accelerometer structure comprise of flexure fixed at one end and having attached proof mass at other end. This structure is designed and simulated using Coventorware. The simulation results show the sensitivity of 4mV/g. The structure is fabricated in N type silicon (100) substrate using Silicon bulk micromachining. This paper also discuses the use of PECVD Si₃N₄ layer as a masking material for silicon micromachining and process flow for accelerometer.

Keywords: Micro-accelerometer, Bulk micromachining

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