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Vol. 189, Issue 6, June 2015, pp. 128-136




An Improved Analytical Approach for Estimation of Misalignment Error of Sensing Axis
in MEMS Accelerometers using Simple Tilt Measurements

R. K. Bhan, Shaveta, Imran, Ramjai Pal and Shankar Dutta

Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi, India 110054
Tel.: 91-011-23903403

E-mail: bhan@sspl.drdo.in


Received: 15 May 2015 /Accepted: 15 June 2015 /Published: 30 June 2015

Digital Sensors and Sensor Sysstems


Abstract: A simple experimental method and improved analytical approach based on tilt measurements (output versus angle) is presented to determine the misalignment error in sensing axis direction of single, two or three-axis accelerometer sensors. The approach is advantageous in resolving and measuring the error because the accuracy is enhanced by using identification that is based on differential and reciprocal differential data of the tilt measurements. Furthermore, the method does not require three accelerometers and there is no need for determination of matrix coefficients as is the practice presently followed in the literature. The method is validated on actual prototype sensors fabricated in our laboratory. The experimental results agree well with the theoretical predictions. The estimates obtained from the proposed method compares well with conventional analytical fit method that requires prior knowledge of sensitivity parameter.


Keywords: Accelerometer, MEMS sensors, IMU, Misalignment, Calibration, Sensing axis.


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