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Vol. 191, Issue 8, August 2015, pp. 63-66




Towards Reproducible Ring Resonator Based Temperature Sensors

Nikolai KLIMOV, Michaela BERGER, * Zeeshan AHMED

Thermodynamic Metrology Group, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA

E-mail: zeeshan.ahmed@nist.gov



Received: 24 June 2015 /Accepted: 30 July 2015 /Published: 31 August 2015

Digital Sensors and Sensor Sysstems


Abstract: In recent years photonic devices have emerged as a powerful tool for developing novel, high-sensitivity sensors. In particular, tremendous progress has been reported in developing photonic temperature sensors using a wide variety of materials including optical fiber and on-chip silicon photonic devices. We recently reported on ultra high sensitivity temperature sensor based on silicon ring resonator structure that has a noise floor of 80 K. Here we have systematically examined the impact of structural parameters on the performance of silicon ring resonator photonic thermometers. Our results suggest that consistently high performance temperature sensors are obtained from the zone of stability (waveguide width > 600 nm, air gap 130 nm and ring radius >10 m) such that quality factors are consistent 104 and the temperature sensitivity is in the 70 pm/K to 80 pm/K range. The zone of stability identified in this work is a useful starting point for future testing of inter-changeability wafer-scale produced sensors.


Keywords: Photonic sensors, Ring resonator, Temperature, Thermo-optic coefficient, CMOS compatible.


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