bullet Sensors & Transducers Journal

    (ISSN: 2306-8515, e-ISSN 1726-5479)


   About this Journal

   Information for Authors

   Editorial Board

   Editorial Calendar

   Current Issue

   Browse Journal

S&T journal's cover

Submit Press Release

Submit White Paper

25 Top Downloaded Articles (2007-2012)


Contact Us





Vol. 214, Issue 7, July 2017, pp. 58-63




T-FinFET Mobility Enhancement from Process-Induced Stress and Compact Model Development

Wanjun Wang, * Jin He, Bing Xie, Guangjin Ma, Guoqing Hu, Chunlai Li, Daye Lin, Jingjing Liu, Ying Yu, Zhangyuan Chen and Zhiping Zhou

Peking University Shenzhen SoC Key Laboratory, PKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, China
Tel: 15013563293

E-mail: frankhe@pku.edu.cn


Received: 1 June 2017 /Accepted: 12 July 2017 /Published: 31 July 2017

Digital Sensors and Sensor Sysstems


Abstract: In the advanced CMOS process lines, the process-induced stress is often used to increase carrier mobility so as to improve MOSFET performance. It also strongly affects the carrier mobility of T-FinFET as long as it is fabricated with the CMOS process as always done in experiment tunneling FET device. Here we report the effect of process-induced stress on mobility enhancement and a corresponding compact model. The layout dependence of T-FinFETís carrier mobility due to process-induced stress is efficiently captured. The mobility model is verified for different layout dimensions for several stress-inducing process technologies through both process simulations and experimental data.


Keywords: nanometerT-FinFET, process technology, strain effect, performane enhancement, modeling


Acrobat reader logo Click <here> or title of paper to download the full pages article in pdf format



This work is licensed under a Creative Commons 4.0 International License


 Creative Commons License





1999 - 2016 Copyright ©, International Frequency Sensor Association (IFSA) Publishing, S.L. All Rights Reserved.

Home - News - Links - Archives - Tools - Voltage-to-Frequency Converters - Standardization - Patents - Marketplace - Projects - Wish List - e-Shop - Sensor Jobs - Membership - Videos - Publishing - Site Map - Subscribe - Search

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Submit Press Release - Submit White Paper - Testimonies - Twitter - Facebook - LinkedIn