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Vol. 98, Issue 11, November 2008, pp.45-53

 

 

Bullet

 

All-digital PLL System for Self-oscillation Mode of Microcantilevers with Integrated Bimorph Actuator
and Piezoresistive Readout
 

1Nikolay Nikolov, 1Nikolay Kenarov, 1Peycho Popov, 2Theodor Gotszalk, 3Ivo Rangelow

1Microsystems LTD, 9010 PO Box 147 Varna, Bulgaria

Tel.: +359 52 321998, fax: +359 52 302534

2Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics,
ul. Wybrzez Wyspianskiego 27, Poland

3Technical University of Ilmenau, Institute of micro-and nanoelectronics,
Gustav - Kirchhoff - Str. 1, Ilmenau, Germany

E-mail: n.nikolov@mikrosistemi.com, n.kenarov@mikrosistemi.com, ppopov@mikrosistemi.com

teodor.gotszalk@pwr.wroc.pl, ivo.rangelow@tu-ilmenau.de

 

 

Received: 23 September 2008   /Accepted: 17 November 2008   /Published: 30 November 2008

 

Abstract: Self-oscillation system for microcantilevers with integrated actuator and piezoresistive read-out has been newly developed. The presented concept uses Phase Locked Loop approach which forces the system to lock at resonance frequency of the microcantilever sensors and to follow its changes. The system has been implemented in FPGA and tested with microcantilever sensors. The feedback response and signal spectrum have been investigated.

 

Keywords: Microcantilever, Self-oscillation, AFM

 

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