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Vol. 98, Issue 11, November 2008, pp.54-68





Modelling of Spring Constant and Pull-down Voltage of Non-uniform RF MEMS Cantilever Incorporating Stress Gradient

1Shimul Chandra SAHA, 2Ulrik HANKE, 3Geir Uri JENSEN, 1Trond SÆTHER

1Department of Electronics and Telecommunications (IET), Norwegian University of Science and Technology (NTNU), 7491 Trondheim, Norway

2Institute of Microsystems Technology, Vestfold University College, 3103 Tønsberg, Norway

3 SINTEF ICT, Gaustadalleen 23, 0371 Oslo, Norway

Tel.: +47 735 92784, fax: +47 7359 1441

E-mail: shimul.saha@iet.ntnu.no



Received: 12 June 2008   /Accepted: 17 November 2008   /Published: 30 November 2008


Abstract: We have presented a model for spring constant and pull-down voltage of a non-uniform radio frequency microelectromechanical systems (RF MEMS) cantilever that works on electrostatic actuation. The residual stress gradient in the beam material that may arise during the fabrication process is also considered in the model. Using basic force deflection calculation of the suspended beam, a stand-alone model for the spring constant and pull-down voltage of the non-uniform cantilever is developed. To compare the model, simulation is performed using standard Finite Element Method (FEM) analysis tolls from CoventorWare. The model matches very well with the FEM simulation results. The model will offer an efficient means of design, analysis, and optimization of RF MEMS cantilever switches.


Keywords: Modelling, Non-uniform cantilever, Spring constant, Stress gradient, Pull-down voltage


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