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Vol. 98, Issue 11, November 2008, pp.69-82





Analysis of a Bimorph Accelerometer Using Analytical and Finite Element Modeling

Hou Xiaoyan

Department of Civil Engineering, National University of Singapore

Singapore 117576

Email: houxiaoyan@gmail.com



Received: 19 August 2008   /Accepted: 17 November 2008   /Published: 30 November 2008


Abstract: In this paper, a Bimorph Accelerometer with symmetric bimorphs and central supporting pole configuration is developed and analytically characterized. Calibration function is defined to describe the system dynamics of the accelerometer. Closed-form expression for the calibration function is then derived based on piezoelectric constitutive equations and beam theory. The analysis takes into account the effect of device geometry and material properties, and agrees well with the results obtained by the finite element analysis. Besides producing accurate predications, it is found that with appropriate geometrical dimensions, both high sensitivity and broad frequency bandwidth, two most important parameters in evaluating accelerometers, can be achieved.


Keywords: Piezoelectric bimorph, Accelerometer, Translational DOF, Frequency bandwidth


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