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Vol. 98, Issue 11, November 2008, pp.83-95

 

 

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Design of a High Performance MEMS Pressure Sensor Array with Signal Conditioning Unit for Oceanographic Applications
 
1C. RoyChaudhuri, 2V. Natarajan, 3P. Chatterjee, 1S. Gangopadhyay, 1V. Sreeramamurthy, 4H. Saha

1Department of Electronics and Telecommunication Engineering, Bengal Engineering and Science University, Shibpur, Howrah-711103, India

Tel.:91-3326684561

2Naval Physical and Oceanographic Laboratory, Trikkakara, Kochi- 682021,India

Tel.: 91 484 2571258

 3School of VLSI Technology, Bengal Engineering and Science University, Shibpur, Howrah-711103, Tel.:-3326684561

4Department of Electronics and Telecommunication Engineering, Jadavpur University,

Kolkata-700032, India

Tel.: 91 3324146833

E-mail: chirosreepram@yahoo.com, natarajan_vinay@yahoo.com, sahahiranmay@yahoo.com

 

 

Received: 19 August 2008   /Accepted: 17 November 2008   /Published: 30 November 2008

 

Abstract: Design of a high performance MEMS pressure sensor array along with its signal conditioning unit is presented for oceanographic applications. The pressure transducer comprises of an improved design of an array of multiple diaphragm bulk micromachined piezoresistive pressure sensors coupled with a CMOS programmable power saving circuit for continuous data storage. The proposed MEMS pressure transducer offers a resolution of 0.0001% of full scale for a pressure range from 0 to 50 bar and linearity of 0.001% full scale with an average power consumption of 4 mW with 3.3V power supply. The entire design has the combined advantage of high resolution and low power consumption comparable to the conventional bulky non-silicon based systems with features of miniaturization and integration owing to its silicon based MEMS structure offering ease of packaging for oceanographic applications.

 

Keywords: Multiple diaphragm, MEMS bulk micromachined piezoresistive pressure sensor array, Low power CMOS circuit

 

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