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Vol. 98, Issue 11, November 2008, pp.96-105





On the Modeling of an Open Channel MEMS Based Capacitive Flow Sensor

1Vafaghi Maryam, 2Besharat Sina, 3Rezazadeh Ghader, 4Motallebi Asadollah

1,2Water Engineering Department, Urmia University, Urmia, Iran

3Mechanical Engineering Department, Urmia University, Urmia, Iran

4Mechanical Engineering Department, Khoy Azad University, Khoy, Iran

3E-mail: g.rezazadeh@urmia.ac.ir



Received: 18 May 2008   /Accepted: 17 November 2008   /Published: 30 November 2008


Abstract: In this paper an open channel MEMS capacitive flow sensor has been designed based on a microplate deflection measuring. Proposed flow sensor consists with two separate units, one for sensing the static fluid pressure and the other for sensing the fluid static and dynamic pressure. The governing equation whose solution holds the answer to all our questions about the sensorís characteristics is a nonlinear elasto-electrostatic equation. Sensorís static response and mechanical behavior of the sensing elements in a channel have been simulated numerically by using of Step by Step Linearization Method. The sensor stability has been examined and the stable region of the sensor has been studied. The effect of fluid velocity and static pressure on stability limit of the sensor has been investigated and the effect of bias voltage on sensor sensitivity has been studied.


Keywords: MEMS, Open channel, Flow sensor, Microplate, Capacitive


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