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Vol. 105, Issue 6, June 2009, pp.135-142





Micro-Flow Based Differential Pressure Sensor


White Paper

Microbridge Technologies, Canada, Inc.


Received: 9 June 2009   /Accepted: 29 June 2009   /Published: 30 June 2009


Abstract: Microbridge Technologies Canada, Inc. has developed a micro-air-flow sensor, integrated on-chip with analog CMOS signal conditioning circuitry and with analog adjustability using Rejustors. The thermo-anemometer flow sensing principle, combined with a micro-flow channel having very high flow-impedance, allows accurate sensing of low differential pressures. The flow-impedance is pre-defined at the die-level, dramatically relaxing demands on subsequent packaging operations. Individual units require only simple offset and gain compensation, leaving barometric pressure correction and temperature correction to be implemented in “standard” post-sensor lookup tables. This enables field-replaceable micro-air-flow sensors, not requiring field calibration. The high flow impedance improves robustness vis-a-vis variability of connection hoses, changing gas filter properties, and humidified air. The technology enables substantial price-reductions with performance and ease-of-use improvements over present solutions.


Keywords: Differential pressure sensor; Micro-air-flow sensor; Rejustor


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