Sensors & Transducers Journal
(ISSN 1726- 5479)
|
205.767 |
|
(ISSN 1726- 5479) |
|
|
|
Sensors & Transducers Journal 2008 Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
|
|
|
|
Vol. 109, Issue 10, October 2009, pp. 92-107
Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization
1B. D. PANT, 2Lokesh DHAKAR, 3P. J. GEORGE and 4S. AHMAD
1MEMS and Micro-sensors Laboratory, Central Electronics Engineering
Research Institute, Council of Scientific and Industrial Research, Pilani-333031 (Rajasthan), India
2Birla Institute of Technology and Science, Pilani (India)
3Kurukshetra Institute of Technology and Management, Kurukshetra (India)
4Institute of Nano Electronic Engineering, University of Malaysia, Perlis (Malaysia)
1Tel.: +91-9413434269, fax: +91-1596-242294
1E-mail: bdpant@gmail.com
Received: 10 August 2009 /Accepted: 23 October 2009 /Published: 30 October 2009
Abstract: The current paper presents an optimization study for the designing of a highly sensitive inertial grade capacitive accelerometer based on comb-drive actuation and sensing. The proof mass, suspension system (beams or tethers), stators and rotors have to be realized through an HAR (high aspect ratio) DRIE (deep reactive ion etching) process for which process optimization has already been done at our laboratory. As the proof mass is a bulk micro-machined structure having a mass in milligram range, the optimum positioning of the tethers on the proof mass is important to have minimum sag, necessary to reduce the off-axis sensitivity. The optimization for the positioning of the tethers has been carried out using a commercial software tool ANSYSTM Multiphysics. The accelerometer has been modeled analytically to predict its characteristics. The dependency of sensitivity on the dimensions of the suspension beams (tethers) has also been verified using the above FEM software tool. The present device has been designed to deliver a high sensitivity of 13.6 mV/g/V for low-g applications.
Keywords: Accelerometer, Comb-drive, Capacitive sensing, High aspect ratio, DRIE
Click
<here> or title of paper
to download the full pages article (2.27 Mb)
|
|
1999 - 2009 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.
Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release
Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map
