Sensors & Transducers Journal
(ISSN 1726- 5479)
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205.767 |
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(ISSN 1726- 5479) |
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Sensors & Transducers Journal 2008 Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
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Vol. 109, Issue 10, October 2009, pp. 143-160
Design Optimization of Cantilever Based MEMS Micro-accelerometer for High-g Applications
1B. D. PANT, 2Shelley GOEL, 3P. J. GEORGE and 4S. AHMAD
1MEMS and Micro-sensors Laboratory, Central Electronics Engineering Research Institute,
Council of Scientific and Industrial Research, Pilani-333031 (Rajasthan), India
2Birla Institute of Technology and Science, Pilani, India
3 Kurukshetra Institute of Technology and Management, Kurukshetra, India
4 Institute of Nano Electronic Engineering, University of Malaysia Perlis, Kangar, Perlis, Malaysia
1Tel.: +91-9413434269, fax: +91-1596-242294
1E-mail: bdpant@gmail.com
Received: 22 September 2009 /Accepted: 24 November 2009 /Published: 30 November 2009
Abstract: Design optimization study of micro-cantilever based MEMS accelerometer is presented in this paper. The cantilever structure is dc biased with an ac signal to extract output voltage generated due to the change in capacitance. This signal modifies the behavior of the sensing element. The cantilever performance under a combined inertial and electrostatic force has been considered for estimating the dimensional dependence of cantilever sensitivity, non-linearity, off-set and critical acceleration and operating voltages. The cantilever performance has been verified using ANSYSTM Multiphysics software. Finally, a micro-accelerometer based on an array of 15 cantilevers has been designed and fabricated with a high sensitivity of 3 - 4 mV/g with a non-linearity of < 1 % for high-g (50 g) applications.
Keywords: Accelerometer, Micro-cantilever, Capacitive sensing, DRIE
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