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Best Articles 2009




Vol. 114, Issue 3, March 2010, pp. 122-131




A Dynamic Micro Force Sensing Probe Based on PVDF


Qiangxian Huang, *Kang Ni, Nan Shi, Maosheng Hou, Xiaolong Wang

Hefei University of Technology, School of Instrument Science and Opt-electric Engineering

Hefei, Tunxi Road 193, 230009, Anhui Province, People’s Republic of China

*Tel.: +86-15955155787, fax: +86-551-2903823

E-mail: nicholaskant.hfut@gmail.com



Received: 28 December 2009   /Accepted: 22 March 2010   /Published: 29 March 2010


Abstract: Polyvinylidene fluoride (PVDF) membrane structure is presented as micro-force sensor which has potential applications in dynamic amplitude modulation scanning probe microscopy (SPM). Driven by two symmetric aligned PZT actuators near its resonance, the membrane has high force and spatial sensitivity. Glued at the bottom of the membrane’s center, an electrochemical etched tungsten stylus is utilized as micro force picker which has high height diameter ratio. Experiments are conducted to verify its dynamic performance like resonant frequencies, spring constant, quality factor and spatial sensitivity of this micro-force sensing probe. This micro-force sensor can be used for high step height surface topographic measurement of soft materials with little damage.


Keywords: PVDF, resonant vibration, micro-force sensor, SPM


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