Vol. 117, Issue 6, June 2010, pp.41-49

A Numerical Approach to Investigate of Pull-In Phenomenon of Circular Micro Plate Subjected to Nonlinear Electrostatic Pressure

Farzad Choobdar Rahim

Mech. Eng. Dept. Urmia University, Urmia, Iran

E-mail: farzad_choobdar@yahoo.com

Received: 1 May 2010   /Accepted: 21 June 2010   /Published: 25 June 2010

Abstract: In this paper, the pull-in phenomenon of an electrostatically actuated circular micropump which is used in drug delivery systems was investigated. The “pull-in” or divergence instability in electrostatically actuated micro electromechanical systems presents a ubiquitous challenge in MEMS technology of great importance. The Circular plate of the micropump was modeled as a thin plate base on Kirchhoff plate theory. The nonlinear coupled electromechanical governing differential equation was discretized using Step by Step Linearization method (S.S.L).The effects of radius, thickness and initial gap of the micropump on the pull-in voltage also were studied and the obtained results were compared with existing results. For this modeling is used MATLAB software.

Keywords: MEMS, Micropump, Pull-in Voltage

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