On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

Vol. 66, Issue 4, April 2006, pp. 526-533

Pull-In Voltage of Fixed-Fixed End Type MEMS Switches with Variative Electrostatic Area

Hamed Sadeghian, Ghader Rezazadeh, Ehsan Malekpour, Ayla Shafipour

Mechanical Engineering Department, Urmia University, Urmia, IRAN

Tel. +98-914-145-1407, fax. +98-441-277-7022

E-mail: Hamed.sadeghian@gmail.com   g.rezazadeh@mail.urmia.ac.ir

Received: 28 January 2006   Accepted: 21 April 2006   Published: 25 April 2006

Abstract. In this paper we developed a new approach to calculation of pull-in voltage of fixed-fixed end type MEMS switches. In the previous works Pull-in voltage has been calculated on a lumped model, when one of them used a distributed model by assuming the electrostatic area is applied the whole of the surface of the beam. In the present work, we used a distributed model to determinate the pull-in voltage. To do this the nonlinear governing equation of the beam with non-uniform electrostatic pressure that applied in the part of beam has been derived. The derived nonlinear equation has been solved numerically and has been showed that the results of our approach are more accurate than the other previous works.

Keywords: MEMS, distributed model, electrostatic pressure

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