Vol. 117, Issue 6, June 2010, pp.120-128

Effect of SiO₂ Overlayer on WO3 Sensitivity to Ammonia

Vibha Srivastava and Kiran Jain

Electronic Materials Division, National Physical Laboratory,

Dr. K.S.Kishnan Marg, New Delhi, India-110012

E-mail: kiran@mail.nplindia.ernet.in

Received: 12 April 2010   /Accepted: 21 June 2010   /Published: 25 June 2010

Abstract: Ammonia gas sensing properties of tungsten trioxide thick film sensor was investigated. The doping of noble catalysts such as Pt, Pd, Au enhanced the gas sensitivity. Platinum doping was found to result in highest sensitivity. Remarkable sensitivity enhancement was realized by coating WO₃ thick film sensors with SiO₂ overlayer. Sol gel process derived silica overlayer increased ammonia gas sensitivity for doped as well as undoped sensor.

Keywords: Ammonia sensor, metal oxide gas sensor, WO₃, sensor, thick film

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