On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

Vol. 66, Issue 4, April 2006, pp. 534-542

Eliminating of the Residual Stresses Effect in the Fixed-Fixed End Type MEMS Switches by Piezoelectric Layers

Rezazadeh Ghader¹, Tahmasebi Ahmadali²

Mech. Eng. Dept. Urmia University, Urmia, Iran

E-mail: ¹g.rezazadeh@mail.urmia.ac.ir

Received: 21 April 2006   Accepted: 24 April 2006   Published: 25 April 2006

Abstract. In this paper, a novel method has been developed to eliminate the tensile or compressive residual stresses effects that have been created due to the fabrication sequence. In the developed model, the tensile or compressive residual stresses in the fixed-fixed end type MEMS switches have been eliminated by using of two piezoelectric layers that have been located on the upper and lower surfaces of switch. The nonlinear governing differential equation of the fixed-fixed end type MEMS switch has been derived by considering the piezoelectric layers and residual stresses. The pull-in voltage and the switching time have been calculated for different applied voltage to the piezoelectric layers. The results show that the both tensile and residual stresses can be eliminated by means of a small applied voltage to the piezoelectric layers.

Keywords: MEMS switches; piezoelectric; residual stresses; pull-in voltage; switching time

Click <here> or title of paper to download the full pages article (191 K)

1999 - 2006 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map