bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)

205.767

2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2010

Editorial Calendar 2010

Submit an Article

Editorial Board

Current Issue

Sensors & Trasducers journal's cover

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents

 

Best Articles 2009

 

 

 

Vol. 119, Issue 8, August 2010, pp.30-45

 

Bullet

 

A Simple Model for Complex Fabrication of MEMS based Pressure Sensor: A Challenging Approach

 

1Himani SHARMA, 1P. A. ALVI and 2J. AKHTAR

1Department of Physics, Banasthali University, Banasthali-304022, Rajasthan, India

2Sensors and Nanotechnology Group,

Central Electronics Engineering Research Institute, Pilani-333031, India

E-mail: parvezapd@yahoo.com

 

 

Received: 20 June 2010   /Accepted: 17 August 2010   /Published: 31 August 2010

 

Abstract: In this paper we have presented the simple model for complex fabrication of MEMS based absolute micro pressure sensor. This kind of modeling is extremely useful for determining its complexity in fabrication steps and provides complete information about process sequence to be followed during manufacturing. Therefore, the need for test iteration decreases and cost, time can be reduced significantly. By using DevEdit tool (part of SILVACO tool), a behavioral model of pressure sensor have been presented and implemented.

 

Keywords: MEMS, Pressure sensor, SILVACO

 

Acrobat reader logo Click <here> or title of paper to download the full pages article (2.4 Mb)

 

 

Read more about  Pressure Sensors

 

 

 

 


1999 - 2010 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.


Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release - Twitter

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map - Video