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Vol. 123, Issue 12, December 2010, pp.15-24

 

Bullet

Design of Piezoelectric PZT Cantilever for Actuator Application

 

1Abhay B. JOSHI, 2*Dhananjay BODAS and 1S. A. GANGAL

1 Department of Electronic Science, University of Pune, Pune 411 007 India

2 Agharkar Research Institute, GG Agarkar road, Pune 411 004 India

Tel.: +91-20-25695195, fax: +91-20-25695301

*E-mail: sag@electronics.unipune.ernet.in

 

 

Received: 14 October 2010   /Accepted: 21 December 2010   /Published: 28 December 2010

 

Abstract: Piezoelectric MEMS cantilever is used as a basic element in sensing and actuation. This paper proposes a structural design of MEMS cantilever for actuator application based on bulk MEMS micromachining technique. The structure consists of a silicon dioxide cantilever with an attached piezoelectric layer. The cantilever is designed using analytical modeling and simulation tool: CoventorWare2009. Analytical and simulation results demonstrate deflection of 5.9 m/V and 2.9 m/V respectively with a resonant frequency of 23 kHz. Obtained results are discussed and compared with the reported data.

 

Keywords: PZT, Actuators

 

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