bullet On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

 

25 Top Downloaded Articles

Submit an Article

Editorial Board

S&T Journal's cover

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

 
   

 

 

Vol. 70, Issue 8, August 2006, pp. 637-644

 

Bullet

 

MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam

 

Shahriar Kouravand, Ghader Rezazadeh, Mehdi Sabet, Ahmadali Tahmasebi

Mech. Eng. Dept. Urmia University, Urmia, IRAN, Tel.: +98-914-145-1407,

Fax: +98-441-277-7022, E-mail: g.rezazadeh@mail.urmia.ac.ir

 

Received: 2 August 2006   /Accepted: 22 August 2006   /Published: 27 August 2006

 

 

Abstract. Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.

 

Keywords: micro thermometer, bimetal, cantilever, capacitance

 

Acrobat reader logo Click <here> or title of paper to download the full pages article (276 K)

 

 

 

 


1999 - 2006 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.


Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map